Micro/Nano Fabrication Platform


Micro/Nano Fabrication Platform provides sufficient cleanrooms of high level cleanness, in which micro-nano scale materials and devices may be fabricated and tested. High end facilities includes: vacuum sputtering coating system, light lithography system、etching system, etc., which will support for high quality fabrication and characterization of complex quantum electric circuits. 

Leader: Rui Wu

Division Director

Tiefu Li

Team Leaders