Surface Profiler

2021/1/25 12:14:38


Overview:This surface profiler supports 2D and 3D measurements of step heights and roughness, plus 2D bow and stress. The innovative optical lever sensor technology offers high resolution measurements, large vertical range and low force measurement capability.

Applications:Surface characterization for Semiconductors and compound semiconductors, SIMS, LED, MEMS, Solar, Automotive, Medical devices.


Vertical accuracy: up to nanometers

Vertical measuring range: 1200μm

Low Force: 0.03 to 15mg

Video: 5MP high-resolution color camera

Keystone Correction: Removes distortion due to side view optics

Arc Correction: Removes error due to arc motion of the stylus