Overview：The PC-1100 is a parallel-plate plasma cleaner to clean organic and inorganic contaminations from the surface of samples. The process chamber allows a user to install multiple electrode shelves, and the flexibility of shelf electrode configuration supports batch processing of a wide range of products, from small electronic components to large substrates.

Applications：Precision cleaning of optical components and molds, surface modification (wettability and adhesion improvement),photoresist ashing, stripping and descum, removal of organic contaminations.

Features：

• Process supports sample size up to 400mmⅹ400mm

• 3 MFC-controlled gas lines(O2, Ar and CF4)

• RF power : 13.56MHz, Max.600W, automatic matching

• Flexible shelf electrode allows processing of a wide variety of samples in either RIE or PE mode

• The process chamber can be configured with multiple large processing shelves to meet high-volume production requirements

• Fully-automatic “one-button” operation with full manual override