Overview：Atomic force microscopy(AFM) is a high-resolution imaging technique where a small probe with a sharp tip is scanned back and forth in a controlled manner across a sample to measure the surface topography at up to atomic resolution.

Applications: characterization of quantum materials(quantum dots, topological materials, superconductors etc.) for their electrical, magnetic and mechanical properties.

Features：

• X-Y scan range： 90μm x 90μm typical, 85μm minimum

• Z range： 10μm typical in imaging and force curve modes, 9.5μm minimum

• Vertical noise floor：<30pm RMS in appropriate environment typical imaging bandwidth (up to 625Hz)

• X-Y position noise(closed-loop)：≤0.15nm RMS typical imaging bandwidth (up to 625Hz)

• X-Y position noise(closed-loop)：≤0.10nm RMS typical imaging bandwidth (up to 625Hz)

• Z sensor noise level(closed-loop)：35pm RMS typical imaging bandwidth (up to 625Hz);50pm RMS, force curve bandwidth (0.1Hz to 5kHz)

• Integral nonlinearity (X-Y-Z)： <0.5% typical

• Sample size/holder： 210mm vacuum chuck for samples, ≤210mm diameter, ≤15mm thick

• Motorized position stage(X-Y axis)：80mm × 150mm inspectable area; 2μm repeatability, unidirectional;3μm repeatability, bidirectional

• Microscope optics: 5-megapixel digital camera;180μm to 1465μm viewing area;Digital zoom and motorized focus